The group of Emerging Microwave Technologies is a part of Physical Electronics Laboratory (research personal more than 20), Department of Microtechnology and Nanoscience. Competences of the group: i) Tuneable Ferroelectric Microwave Components and Devices - varactors, delay lies, phase shifters and phase modulators, band-pass, rejection filters, VCOs etc (design, fabrication, experiment), ii) Passives in Silicon MMICs (RFICs). New designs and loss reduction in microwave components based on standard silicon technology (design, fabrication, experiment), iii) Design and modeling of Passive Microwave Components in MMICs and MICs based on conformal mapping technique, iv) Metamaterials integrated with SiMMIC, ferroelectric/SiMMIC, v) High Temperature Superconductors (HTC) in passive microwave devices, interconnects, filters, phase shifters, switches etc, vi) Microwave photonic components and devices-optically controlled microwave components, microwave fiber optical links, generation of microwave/sub-millimetre-wave signals based on heterodyne mixing of two laser illuminations. In recent years the group managed to develop state-of-the-art silicon substrate integrated varactors. Newly built modern clean room facilities are at the disposal of the group. The main clean room, in the process lab with a total area of 1000 m2, contains 25 m2 of class 1 space, appr. 140 m2 of class 10, appr 200 m2 of class 100 with the rest class 1000. Complementary Training lab (Process lab 2), with an additional clean room area of 240 m2 of class 10 000, student as well as start-up activities are taking place. Additional classified areas are the component MBE, chemical preparation and CMP/dicing rooms. Ferroelectric films are fabricated using laser ablation technique and magnetron sputtering (up to 6” wafers). Photolithography permits fabrication of devices with nanometer (minimum size feature 4 nm) feature sizes. The main (computer controlled) facilities in microwave measurement lab include: Vector network analyzers for measurements up to 60 GHz (HP 8510C, and HP N5230A PNA) Cryocooled (20-300K) probe station with optical ports, a probe station for measurements in temperature range 300-600K, ferroelectric materials and device characterizer TF 2000, HP 4285A LRC meter, HP Semiconductor device characterizer. The main commercial microwave software includes HFSS, ADS, Sonnet and Microwave Office. The research activities of the group are strongly correlated and carried out in close collaboration with the Microwave and High Speed Electronics Research Centre at Ericsson AB.
www.chalmers.se/mc2/EN/laboratories/physical-electronics/research/microwave-technology