Activity report No 2

Executive Summary

In WP1 the electrical, structural and chemical properties of the fabricated ferroelectric films are studied further and analytical models of the dielectric and field-induced piezoelectric effect are developed. In WP2 the materials, processes, and test structures are developed.

In WP3 the device demonstrators (varactors, delay lines and tuneable TFBARs) are successfully developed and the partners started development of the circuit demonstrators.

WP4 concerns the assessment of the fabrication process and the demonstrator performance by industrial partners. The first task has been completed at T18. The second task starts at T31.

In WP5 the use plans and dissemination plans are updated and summarised in deliverable D25.2. The research results are successfully disseminated in a special issue of the leading IEEE journal, 18 published papers, conference and workshop presentations

Management: Both spent efforts and finances are on target. The financial aspects of the project are summarised in project management report (PMR2). The amendments in the Contract, regarding transfer from Philips to NXP, are completed and a new edition of the work program is submitted and approved by the EC. All deliverables planned for the reported period: D5, D19, D21, D25.2, PMR2, and D26.5 (this document) are submitted in time.

Major achievements:

• Models of the dielectric properties, field induced piezoelectric effect and nonlinearities are developed

• The main fabrication processes are developed for the devices and circuit demonstrators

• The devices demonstrators (varactor and tuneable TFBAR) and the models for them are developed